Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7223975 | Inspection apparatus for circuit pattern | Masaaki Nojiri, Kouichi Hayakawa, Hiroyuki Shinada, Yukio Hagita | 2007-05-29 |
| 7133550 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2006-11-07 |
| 7129727 | Defect inspecting apparatus | Tsutomu Saito, Osamu Yamada, Eiichi Hazaki, Hirofumi Sato, Yoshikazu Inada +1 more | 2006-10-31 |
| 7071468 | Circuit pattern inspection method and its apparatus | Hiroshi Miyai, Ryuichi Funatsu, Taku Ninomiya | 2006-07-04 |
| 7049587 | Apparatus for inspecting a specimen | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka, Munenori Fukunishi +2 more | 2006-05-23 |
| 7034298 | Inspection method and apparatus using an electron beam | Hiroshi Miyai, Ryuichi Funatsu, Taku Ninomiya | 2006-04-25 |
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka +2 more | 2005-12-13 |
| 6919564 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2005-07-19 |
| 6903821 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2005-06-07 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka +2 more | 2005-05-24 |
| 6759655 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +1 more | 2004-07-06 |
| 6567168 | Inspection method, apparatus and system for circuit pattern | Takashi Hiroi | 2003-05-20 |
| 6504609 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi | 2003-01-07 |
| 6493082 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2002-12-10 |
| 6480279 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi | 2002-11-12 |
| 6421122 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2002-07-16 |
| 6388747 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi | 2002-05-14 |