Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7048869 | Plasma processing apparatus and a plasma processing method | Kazue Takahashi, Tetsunori Kaji, Ken'etsu Yokogawa | 2006-05-23 |
| 6923885 | Plasma processing system and apparatus and a sample processing method | Tatehito Usui, Mitsuru Suehiro, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2005-08-02 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2005-04-19 |
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto +1 more | 2004-12-07 |
| 6815365 | Plasma etching apparatus and plasma etching method | Kazue Takahashi, Mitsuru Suehiro, Tetsunori Kaji, Saburo Kanai | 2004-11-09 |
| 6796269 | Apparatus and method for monitoring plasma processing apparatus | Ichiro Sasaki, Muneo Furuse, Hideyuki Yamamoto | 2004-09-28 |
| 6776872 | Data processing apparatus for semiconductor processing apparatus | Junichi Tanaka, Akira Kagoshima, Shoji Ikuhara, Hideyuki Yamamoto | 2004-08-17 |
| 6755932 | Plasma processing system and apparatus and a sample processing method | Tatehito Usui, Mitsuru Suehiro, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2004-06-29 |
| 6745096 | Maintenance method and system for plasma processing apparatus etching and apparatus | Hideyuki Yamamoto, Shoji Ikuhara, Akira Kagoshima, Junichi Tanaka | 2004-06-01 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2004-05-11 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto +1 more | 2004-03-16 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Seiichiro Kanno, Hironobu Kawahara, Mitsuru Suehiro, Saburou Kanai | 2004-01-13 |
| 6626268 | Elevator door opening and closing device and opening and closing control method | Yasuyuki Oikawa | 2003-09-30 |
| 6616759 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamato +1 more | 2003-09-09 |
| 6533075 | Elevator group supervisory control system for processing hall call information | — | 2003-03-18 |
| 6506686 | Plasma processing apparatus and plasma processing method | Kazue Takahashi, Ryoji Fukuyama, Tomoyuki Tamura | 2003-01-14 |
| 6503364 | Plasma processing apparatus | Tatehito Usui, Shigeru Shirayone, Kazue Takahashi, Mitsuru Suehiro | 2003-01-07 |
| 6422172 | Plasma processing apparatus and plasma processing method | Jyunichi Tanaka, Toru Otsubo, Ichiro Sasaki, Tetsunori Kaji, Katsuya Watanabe | 2002-07-23 |
| 6245190 | Plasma processing system and plasma processing method | Katsuhiko Mitani, Tetsunori Kaji, Jun'ichi Tanaka, Katsuya Watanabe, Shigeru Shirayone +4 more | 2001-06-12 |
| 6171438 | Plasma processing apparatus and plasma processing method | Kazue Takahashi, Mitsuru Suehiro, Tetsunori Kaji, Saburo Kanai | 2001-01-09 |
| 6145923 | Automobile frontbody structure | — | 2000-11-14 |
| 6086141 | Body structure for motor vehicle | Masayuki Honma | 2000-07-11 |
| 5994439 | Vinyl chloride resin composition for powder molding | Manabu Ogiwara, Hideaki Hayashi, Junzo Ukai, Hideo Nishimura | 1999-11-30 |
| 5893978 | Purifying method and purification system for lakes and marshes | Hiroaki Yoda, Shiro Nakadaira, Takashi Mizumori, Koichi Tsuzuki | 1999-04-13 |
| 5820204 | Body structure for a motor vehicle | Masayuki Honma | 1998-10-13 |