| 7156719 |
Polishing apparatus |
Takuji Hayama, Masafumi Inoue |
2007-01-02 |
| 7150673 |
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus |
Tetsuji Togawa, Yoshihiro Mochizuki, Akira Fukuda, Hirokuni Hiyama, Kazuto Hirokawa +1 more |
2006-12-19 |
| 7101255 |
Polishing apparatus |
Seiji Katsuoka, Manabu Tsujimura, Hiroyuki Osawa |
2006-09-05 |
| 7083507 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more |
2006-08-01 |
| 7033260 |
Substrate holding device and polishing device |
Tetsuji Togawa, Osamu Nabeya, Makoto Fukushima, Hiroshi Yoshida, Teruhiko Ichimura |
2006-04-25 |
| 6953390 |
Polishing apparatus |
Hiroshi Yoshida, Tetsuji Togawa |
2005-10-11 |
| 6942541 |
Polishing apparatus |
Tetsuji Togawa, Ritsuo Kikuta |
2005-09-13 |
| 6918814 |
Polishing apparatus |
Seiji Katsuoka, Manabu Tsujimura, Hiroyuki Osawa |
2005-07-19 |
| 6878044 |
Polishing apparatus |
Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more |
2005-04-12 |
| 6852019 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more |
2005-02-08 |
| 6821037 |
Printing device provided with cutter to cut recording paper |
Norio Mizutani, Naomi Yamamoto |
2004-11-23 |
| 6682408 |
Polishing apparatus |
Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more |
2004-01-27 |
| 6578891 |
Substrate holder and substrate transfer apparatus using the same |
Hiroo Suzuki, Kenya Ito, Satoshi Wakabayashi, Tetsuji Togawa |
2003-06-17 |
| 6413146 |
Polishing apparatus |
Seiji Katsuoka, Manabu Tsujimura, Hiroyuki Osawa |
2002-07-02 |
| 6402597 |
Polishing apparatus and method |
Seiji Katsuoka |
2002-06-11 |
| 6358128 |
Polishing apparatus |
Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more |
2002-03-19 |
| 6358131 |
Polishing apparatus |
Satoshi Wakabayashi, Tetsuji Togawa |
2002-03-19 |
| 6354922 |
Polishing apparatus |
Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more |
2002-03-12 |
| 6332826 |
Polishing apparatus |
Seiji Katsuoka, Manabu Tsujimura, Hiroyuki Osawa |
2001-12-25 |
| 6283822 |
Polishing apparatus |
Tetsuji Togawa, Ritsuo Kikuta |
2001-09-04 |
| 6227954 |
Polishing apparatus |
Tetsuji Togawa, Kuniaki Yamaguchi, Hiromi Yajima |
2001-05-08 |
| 5961380 |
Robotic transport apparatus |
Tetsuji Togawa, Kuniaki Yamaguchi |
1999-10-05 |
| 5893794 |
Polishing apparatus having robotic transport apparatus |
Tetsuji Togawa, Kuniaki Yamaguchi |
1999-04-13 |
| 5860847 |
Polishing apparatus |
Tetsuji Togawa, Toyomi Nishi, Seiji Katsuoka, Hiromi Yajima, Masako Kodera |
1999-01-19 |
| 5839947 |
Polishing apparatus |
Norio Kimura, Tetsuji Togawa, Seiji Katsuoka, Toyomi Nishi |
1998-11-24 |
