Issued Patents All Time
Showing 26–50 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8390787 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Robert-Han Munning Schmidt | 2013-03-05 |
| 8194242 | Substrate distortion measurement | Antonius Theodorus Anna Maria Derksen, Erik Marie Jose Smeets | 2012-06-05 |
| 7948606 | Moving beam with respect to diffractive optics in order to reduce interference patterns | Huibert Visser, Johannes Jacobus Matheus Baselmans, Henri Johannes Petrus Vink | 2011-05-24 |
| 7911586 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Arno Jan Bleeker | 2011-03-22 |
| 7880875 | Apparatus and method for inspecting circuit structures | Kees Moddemeyer, Henri Johannes Petrus Vink | 2011-02-01 |
| 7812930 | Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume | Theodorus Leonardus Van Den Akker, Martinus Hendricus Hoeks, Lambertus Gerardus Maria Kessels, Marco Cornelis Jacobus Martinus Van Hassel, Frank Anton Morselt | 2010-10-12 |
| 7714986 | Laser beam conditioning system comprising multiple optical paths allowing for dose control | Huibert Visser, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink | 2010-05-11 |
| 7684009 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Peter Spit, Eduard Hoeberichts | 2010-03-23 |
| 7643128 | Large field of view projection optical system with aberration correctability | Robert D. Harned, Cheng-Qun Gui | 2010-01-05 |
| 7609362 | Scanning lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Jacob Klinkhamer, Eduard Hoeberichts | 2009-10-27 |
| 7576834 | Lithographic apparatus and device manufacturing method | Richard Alexander George, Cheng-Qun Gui, Robbert Edgar Van Leeuwen, Jacobus Burghoorn | 2009-08-18 |
| 7538855 | Lithographic apparatus and device manufacturing method | Kars Zeger Troost, Johan Christiaan Gerard Hoefnagels | 2009-05-26 |
| 7522266 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Arno Jan Bleeker | 2009-04-21 |
| 7477403 | Optical position assessment apparatus and method | Cheng-Qun Gui, Fransiscus Godefridus Casper Bijnen, Johan Christiaan Gerard Hoefnagels, Joannes Theodoor De Smit | 2009-01-13 |
| 7428040 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Arno Jan Bleeker, Joost Sytsma | 2008-09-23 |
| 7426076 | Projection system for a lithographic apparatus | Cheng-Qun Gui, Robert D. Harned, Nora-Jean Harned | 2008-09-16 |
| 7390614 | Lithographic apparatus and device manufacturing method | Johannes Gijsbertsen, Michiel David Nijkerk | 2008-06-24 |
| 7385675 | Lithographic apparatus and device manufacturing method | Richard Alexander George, Cheng-Qun Gui, Robbert Edgar Van Leeuwen, Jacobus Burghoom | 2008-06-10 |
| 7379153 | Lithographic apparatus and device manufacturing method | Johannes Gijsbertsen, Michiel David Nijkerk | 2008-05-27 |
| 7342644 | Methods and systems for lithographic beam generation | Johannes Jacobus Matheus Baselmans, Anastasius Jacobus Anicetus Bruinsma, Robert-Han Munnig Schmidt, Henri Johannes Petrus Vink | 2008-03-11 |
| 7336343 | Lithographic apparatus and device manufacturing method | — | 2008-02-26 |
| 7324186 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui | 2008-01-29 |
| 7304718 | Lithographic apparatus and device manufacturing method | Johannes Jacobus Matheus Baselmans, Arno Jan Bleeker, Kars Zeger Troost | 2007-12-04 |
| 7253881 | Methods and systems for lithographic gray scaling | Joeri Lof, Joannes Theodor De Smit | 2007-08-07 |
| 7251019 | Lithographic apparatus and device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging | Patricius Aloysius Jacobus Tinnemans | 2007-07-31 |