Issued Patents All Time
Showing 51–73 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7218380 | Lithographic apparatus and device manufacturing method | — | 2007-05-15 |
| 7209216 | Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography | Theodorus Leonardus Van Den Akker, Willem Jurrianus Venema, Wouter Frans Willem Mulckhuyse, Lambertus Gerardus Maria Kessels | 2007-04-24 |
| 7202939 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Robert-Han Munnig Schmidt | 2007-04-10 |
| 7190434 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Arno Jan Bleeker, Joost Sytsma | 2007-03-13 |
| 7158208 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Peter Spit, Eduard Hoeberichts | 2007-01-02 |
| 7142286 | Lithographic apparatus and device manufacturing method | — | 2006-11-28 |
| 7133118 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Arno Jan Bleeker | 2006-11-07 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Richard Johannes Franciscus Van Haren +7 more | 2006-09-26 |
| 7102732 | Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element | Pieter Kruit, Arno Jan Bleeker, Karel Diederick Van Der Mast | 2006-09-05 |
| 7081944 | Lithographic projection apparatus and device manufacturing method utilizing two arrays of focusing elements | — | 2006-07-25 |
| 7081947 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui | 2006-07-25 |
| 7079225 | Lithographic apparatus and device manufacturing method | Johannes Jacobus Matheus Baselmans, Anastasius Jacobus Anicetus Bruinsma, Henri Johannes Petrus Vink | 2006-07-18 |
| 7061586 | Lithographic apparatus and device manufacturing method | Joost Sytsma | 2006-06-13 |
| 7061581 | Lithographic apparatus and device manufacturing method | — | 2006-06-13 |
| 7023525 | Imaging apparatus | Arno Jan Bleeker, Jason Hintersteiner, Borgert Kruizinga, Matthew Eugene McCarthy, Mark Oskotsky +6 more | 2006-04-04 |
| 7016016 | Lithographic apparatus and device manufacturing method | Robert-Han Munnig Schmidt, Theodorus Leonardus Van Den Akker | 2006-03-21 |
| 7016014 | Lithographic apparatus and device manufacturing method | — | 2006-03-21 |
| 6995830 | Lithographic projection apparatus and device manufacturing method | — | 2006-02-07 |
| 6989886 | Lithographic apparatus and device manufacturing method | — | 2006-01-24 |
| 6835943 | Electron-beam lithography | Gerardus Johannes Verhaart, Quirinus Antonius Gerardus Van Vlimmeren | 2004-12-28 |
| 6778257 | Imaging apparatus | Arno Jan Bleeker, Jason Hintersteiner, Borgert Kruizinga, Matthew Eugene McCarthy, Mark Oskotsky +6 more | 2004-08-17 |
| 6633366 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Pieter Kruit, Arno Jan Bleeker, Karel Diederick Van Der Mast | 2003-10-14 |
| 6459472 | Lithographic device | Henri Gerard Cato Werij, Peter van Zuylen | 2002-10-01 |