Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8951913 | Method for removing native oxide and associated residue from a substrate | Bo Zheng, Arvind Sundarrajan | 2015-02-10 |
| 8927423 | Methods for annealing a contact metal layer to form a metal silicidation layer | Wei V. Tang, Kavita Shah, Srinivas Gandikota, San Yu, Avgerinos V. Gelatos | 2015-01-06 |
| 8871064 | Electromagnet array in a sputter reactor | Tza-Jing Gung, Arvind Sundarrajan, Edward P. Hammond, IV, Praburam Gopalraja, John C. Forster +2 more | 2014-10-28 |
| 8852674 | Method for segregating the alloying elements and reducing the residue resistivity of copper alloy layers | Jick Yu | 2014-10-07 |
| 8772162 | Method for removing native oxide and associated residue from a substrate | Bo Zheng, Arvind Sundarrajan | 2014-07-08 |
| 8765601 | Post deposition treatments for CVD cobalt films | Yu Lei, Anantha K. Subramani, Seshadri Ganguli, Srinivas Gandikota | 2014-07-01 |
| 8637410 | Method for metal deposition using hydrogen plasma | Anantha K. Subramani, John C. Forster, Seshadri Ganguli, Michael S. Jackson, Xinliang Lu +2 more | 2014-01-28 |
| 8586479 | Methods for forming a contact metal layer in semiconductor devices | Srinivas Gandikota, Sang Ho Yu, Kavita Shah, Yu Lei | 2013-11-19 |
| 8580354 | Plasma treatment of substrates prior to deposition | Jick Yu | 2013-11-12 |
| 8580630 | Methods for forming a metal gate structure on a substrate | Jianxin Lei, Srinivas Gandikota, Jian Z. Ren | 2013-11-12 |
| 8524600 | Post deposition treatments for CVD cobalt films | Yu Lei, Anantha K. Subramani, Seshadri Ganguli, Srinivas Gandikota | 2013-09-03 |
| 8455352 | Method for removing native oxide and associated residue from a substrate | Bo Zheng, Arvind Sundarrajan | 2013-06-04 |
| 8349724 | Method for improving electromigration lifetime of copper interconnection by extended post anneal | Jick Yu | 2013-01-08 |
| 8168543 | Methods of forming a layer for barrier applications in an interconnect structure | Keyvan Kashefizadeh, Ashish Bodke, Winsor Lam, Yiochiro Tanaka, Wonwoo Kim | 2012-05-01 |
| 8021514 | Remote plasma source for pre-treatment of substrates prior to deposition | Jick Yu | 2011-09-20 |
| 7807568 | Methods for reducing damage to substrate layers in deposition processes | Arvind Sundarrajan | 2010-10-05 |
| 7704887 | Remote plasma pre-clean with low hydrogen pressure | John C. Forster, Jick Yu, Ajay Bhatnagar, Praburam Gopalraja | 2010-04-27 |
| 7695567 | Water vapor passivation of a wall facing a plasma | — | 2010-04-13 |
| 7686926 | Multi-step process for forming a metal barrier in a sputter reactor | Tza-Jing Gung, Arvind Sundarrajan, Edward P. Hammond, IV, Praburam Gopalraja, John C. Forster +2 more | 2010-03-30 |
| 7658802 | Apparatus and a method for cleaning a dielectric film | John C. Forster, Wei Wang | 2010-02-09 |
| 7618521 | Split magnet ring on a magnetron sputter chamber | — | 2009-11-17 |
| 7618893 | Methods of forming a layer for barrier applications in an interconnect structure | Keyvan Kashefizadeh, Ashish Bodke, Winsor Lam, Yiochiro Tanaka, Wonwoo Kim | 2009-11-17 |
| 7615489 | Method for forming metal interconnects and reducing metal seed layer overhang | — | 2009-11-10 |
| RE39337 | Nude mouse model for human neoplastic disease | Ann Monosov | 2006-10-10 |
| 5569812 | Nude mouse model for human neoplastic disease | Ann Monosov | 1996-10-29 |