Issued Patents All Time
Showing 51–75 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8528762 | Electron beam welding of large vacuum chamber body having a high emissivity coating | Mehran Behdjat, Makoto Inagawa | 2013-09-10 |
| D687535 | Heater plate and heater element assembly | Makoto Inagawa | 2013-08-06 |
| D680946 | Gas flow diffuser faceplate | Suhail Anwar, John M. White, Soo Young Choi, Gaku Furuta, Carl Sorenson +1 more | 2013-04-30 |
| 8327878 | Chamber isolation valve RF grounding | Ke Ling Lee, Emanuel Beer | 2012-12-11 |
| D670372 | Heater plate and heater element assembly | Makoto Inagawa | 2012-11-06 |
| 8297591 | Slit valve control | Takayuki Matsumoto | 2012-10-30 |
| D669032 | Flow blocking shadow frame support | Suhail Anwar, John M. White, Soo Young Choi, Gaku Furuta, Carl Sorenson +1 more | 2012-10-16 |
| 8272830 | Scissor lift transfer robot | Takayuki Matsumoto, Suhail Anwar | 2012-09-25 |
| 8216422 | Substrate support bushing | Suhail Anwar, Toshio Kiyotake | 2012-07-10 |
| 8206075 | Methods and apparatus for sealing a chamber | John M. White, William N. Sterling, Yoshiaki Tanase | 2012-06-26 |
| 8124907 | Load lock chamber with decoupled slit valve door seal compartment | Jae-Chull Lee, Suhail Anwar | 2012-02-28 |
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2011-12-27 |
| 8070408 | Load lock chamber for large area substrate processing system | Mehran Behdjat, Makoto Inagawa, Suhail Anwar | 2011-12-06 |
| 8061949 | Multiple slot load lock chamber and method of operation | Suhail Anwar, Jae-Chull Lee | 2011-11-22 |
| 8033245 | Substrate support bushing | Suhail Anwar, Toshio Kiyotake | 2011-10-11 |
| 8033772 | Transfer chamber for vacuum processing system | Emanuel Beer, Hung T. Nguyen, Wendell T. Blonigan | 2011-10-11 |
| 7988129 | Floating slit valve for transfer chamber interface | John M. White, Takayuki Matsumoto | 2011-08-02 |
| 7982266 | Dielectric material separated-type, high breakdown voltage semiconductor circuit device, and production method thereof | Atsuo Watanabe, Mitsutoshi Honda, Norio Ishitsuka, Masahiro Ito, Toshihito Tabata +1 more | 2011-07-19 |
| 7976635 | Dual substrate loadlock process equipment | Wendell T. Blonigan, Akihiro Hosokawa | 2011-07-12 |
| 7973546 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner +3 more | 2011-07-05 |
| 7923057 | Methods and apparatus for reducing irregularities in color filters | Bassam Shamoun | 2011-04-12 |
| 7919972 | Integrated substrate transfer module | Emanuel Beer, Hung T. Nguyen, Benjamin M. Johnston, Fayez E. Abboud | 2011-04-05 |
| 7847566 | Configurable prober for TFT LCD array test | Matthias Brunner, Ralf Schmid, Fayez (Frank) E. Abboud, Benjamin M. Johnston, Paul Bocian +1 more | 2010-12-07 |
| 7845891 | Decoupled chamber body | Jae-Chull Lee, John M. White, Suhail Anwar | 2010-12-07 |
| 7822324 | Load lock chamber with heater in tube | Suhail Anwar, Jae-Chull Lee | 2010-10-26 |