Issued Patents All Time
Showing 101–125 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7086638 | Methods and apparatus for sealing an opening of a processing chamber | Ke Ling Lee, Wendell T. Blonigan | 2006-08-08 |
| 7075323 | Large substrate test system | Matthias Brunner, Wendell T. Blonigan, Edgar Kehrberg | 2006-07-11 |
| 7018517 | Transfer chamber for vacuum processing system | Emanuel Beer, Hung T. Nguyen, Wendell T. Blonigan | 2006-03-28 |
| 6992316 | Angled sensors for detecting substrates | — | 2006-01-31 |
| 6949143 | Dual substrate loadlock process equipment | Wendell T. Blonigan, Akihiro Hosokawa | 2005-09-27 |
| 6856858 | Shared sensors for detecting substrate position/presence | — | 2005-02-15 |
| 6833717 | Electron beam test system with integrated substrate transfer module | Emanuel Beer, Hung T. Nguyen, Benjamin M. Johnston | 2004-12-21 |
| 6824343 | Substrate support | Wendell T. Blonigan, Suhail Anwar, Toshio Kiyotake, Hung T. Nguyen | 2004-11-30 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Wendell T. Blonigan +1 more | 2004-06-08 |
| 6719851 | Lid assembly for opening a process chamber lid and uses therefor | Wendell T. Blonigan | 2004-04-13 |
| 6585828 | Process chamber lid service system | Wendell T. Blonigan | 2003-07-01 |
| 6577923 | Apparatus and method for robotic alignment of substrates | John M. White | 2003-06-10 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Wendell T. Blonigan +1 more | 2003-02-11 |
| 6235634 | Modular substrate processing system | John M. White, Robert B. Conner, Jr., Kam S. Law, Norman L. Turner, William T. Lee | 2001-05-22 |
| 6213704 | Method and apparatus for substrate transfer and processing | John M. White, Wendell T. Blonigan, Robin L. Tiner | 2001-04-10 |
| 6176668 | In-situ substrate transfer shuttle | John M. White | 2001-01-23 |
| 5862103 | Magneto-optical recording method capable of determining optimum laser beam intensities | Hiroyuki Matsumoto, Koichiro Ishii, Masashi Horikawa | 1999-01-19 |
| 5852596 | Adjusting a detected signal with a wave form equalizer based upon environmental temperature or heat characteristic of an optical disk | Hiroyuki Matsumoto, Masashi Horikawa, Koichiro Ishii | 1998-12-22 |
| 5831943 | Stabilized overwriteable optical recording method using laser beam intensity settings | Hiroyuki Matsumoto, Koichiro Ishii, Masashi Horikawa | 1998-11-03 |
| 5726954 | Optical recording method and apparatus | Hiroyuki Matsumoto, Koichiro Ishii, Masashi Horikawa | 1998-03-10 |
| 5684765 | Optical recording method and control | Hiroyuki Matsumoto, Koichiro Ishii, Masashi Horikawa | 1997-11-04 |
| 5682366 | Optical disc recording apparatus with efficient data checking | Yoshihiro Yamanaka, Jun Saito | 1997-10-28 |
| 5600612 | Magnetooptic recording method and apparatus | Jun Saito, Yoshihiro Yamanaka, Kazutomo Miyata | 1997-02-04 |
| 5581535 | Prepulse conditon/heat shut off condition determination method and apparatus for optical recording, and optical recording method and apparatus | Jun Saito | 1996-12-03 |
| 5577019 | Prepulse condition/heat shut off condition determination method and apparatus for optical recording, and optical recording method and apparatus | Jun Saito | 1996-11-19 |