Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7033447 | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus | Yixing Lin, Brian T. West, Shun Wu, Clifford Stow, Hong Wang +1 more | 2006-04-25 |
| 6949203 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Chang-Lin Hsieh, Diana Xiaobing Ma, Brian Sy-Yuan Shieh, Gerald Yin, Jennifer Y. Sun +2 more | 2005-09-27 |
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Dennis S. Grimard, Arnold Kholodenko, Alex Veytser, Wing Cheng | 2004-09-21 |
| 6776873 | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers | Jennifer Y. Sun, Shun Wu, Ananda H. Kumar, Robert Wu, Hong Wang +2 more | 2004-08-17 |
| 6736668 | High temperature electrical connector | Arnold Kholodenko, Wing Cheng, Alvin Lau, Dennis S. Grimard | 2004-05-18 |
| 6659331 | Plasma-resistant, welded aluminum structures for use in semiconductor apparatus | Jennifer Y. Sun, Shun Wu, Yixing Lin, Clifford Stow | 2003-12-09 |
| 6572814 | Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas | Shamouil Shamoulian, Arnold Kholodenko, Wing Cheng | 2003-06-03 |
| 6466426 | Method and apparatus for thermal control of a semiconductor substrate | Yeuk-Fai Edwin Mok, Dmitry Lubomirsky, Dennis Koosau, Danny D. WANG, Paul Exline | 2002-10-15 |
| 6151203 | Connectors for an electrostatic chuck and combination thereof | Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Dennis S. Grimard, Liang Wang +4 more | 2000-11-21 |