Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669538 | Pad cleaning for a CMP system | Shijian Li, Ramin Emami, Shi-Ping Wang, Fred C. Redeker, Lizhong Sun +1 more | 2003-12-30 |
| 6656842 | Barrier layer buffing after Cu CMP | Shijian Li, Fred C. Redeker, Ramin Emami, John M. White | 2003-12-02 |
| 6648740 | Carrier head with a flexible membrane to form multiple chambers | Ilya Perlov, Eugene Gantvarg | 2003-11-18 |
| 6540594 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Manoocher Birang, Hung Chih Chen | 2003-04-01 |
| 6520847 | Polishing pad having a grooved pattern for use in chemical mechanical polishing | Thomas H. Osterheld | 2003-02-18 |
| 6511367 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Kapila Wijekoon | 2003-01-28 |
| 6506104 | Carrier head with a flexible membrane | Ilya Perlov, Eugene Gantvarg | 2003-01-14 |
| 6432826 | Planarized Cu cleaning for reduced defects | Ramin Emami, Shijian Li, Fred C. Redeker, Madhavi R. Chandrachood | 2002-08-13 |
| 6386955 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Manoocher Birang, Hung Chih Chen | 2002-05-14 |
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Kapila Wijekoon | 2002-04-09 |
| 6277010 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Ilya Perlov, Eugene Gantvarg | 2001-08-21 |
| 6183354 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Manoocher Birang, Hung Chih Chen | 2001-02-06 |
| 6146259 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Kapila Wijekoon | 2000-11-14 |
| 6106378 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Iiya Perlov, Eugene Gantvarg | 2000-08-22 |
| 5964653 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Ilya Perlov, Eugene Gantvarg | 1999-10-12 |
| 5938507 | Linear conditioner apparatus for a chemical mechanical polishing system | Richard V. Rafloski, James Nystrom, John Prince, Alfred A. Goldspiel, Stephen J. Blumenkranz +1 more | 1999-08-17 |
| 5921855 | Polishing pad having a grooved pattern for use in a chemical mechanical polishing system | Tom Osterheld | 1999-07-13 |
| 5795215 | Method and apparatus for using a retaining ring to control the edge effect | William L. Guthrie, Tsungnan Cheng, Harry Q. Lee, Michael Sherwood, Norm Shendon | 1998-08-18 |