Issued Patents All Time
Showing 26–50 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Eric A. Englhardt +6 more | 2011-11-29 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliot, Jeffrey C. Hudgens | 2011-09-20 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2011-03-22 |
| 7857570 | Method and apparatus for supplying substrates to a processing tool | Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt | 2010-12-28 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Eric A. Englhardt +6 more | 2010-09-21 |
| 7798309 | Stabilizing substrate carriers during overhead transport | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2010-09-21 |
| 7792608 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2010-09-07 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7711445 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Eric A. Englhardt, Vinay Shah, Martin R. Elliott, Jeffrey C. Hudgens | 2010-05-04 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7684895 | Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2010-03-23 |
| 7674360 | Mechanism for varying the spacing between sputter magnetron and target | Ilyoung Richard Hong, Donny Young, Michael Rosenstein, Daniel C. Lubben, Michael Miller +3 more | 2010-03-09 |
| 7673735 | System for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2010-03-09 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Eric A. Englhardt +6 more | 2010-01-26 |
| 7611318 | Overhead transfer flange and support for suspending a substrate carrier | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-11-03 |
| 7597183 | Kinematic pin with shear member and substrate carrier for use therewith | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2009-10-06 |
| 7594789 | Overhead transfer flange and support for suspending a substrate carrier | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-09-29 |
| 7577487 | Methods and apparatus for a band to band transfer module | Eric A. Englhardt, Michael R. Rice, Vinay Shah, Sushant S. Koshti, Jeffrey C. Hudgens | 2009-08-18 |
| 7552816 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2009-06-30 |
| 7540371 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2009-06-02 |
| 7537108 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-05-26 |
| 7527141 | System for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-05-05 |
| 7506752 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-03-24 |