Issued Patents All Time
Showing 51–75 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7506746 | System for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-03-24 |
| 7506747 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2009-03-24 |
| 7503448 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2009-03-17 |
| 7455172 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2008-11-25 |
| 7433756 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2008-10-07 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Eric A. Englhardt +6 more | 2008-05-20 |
| 7374393 | Method of retaining a substrate during a substrate transferring process | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Eric A. Englhardt +6 more | 2008-05-20 |
| 7367446 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2008-05-06 |
| 7359767 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2008-04-15 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2008-04-15 |
| 7346431 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyer | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2008-03-18 |
| 7299831 | Substrate carrier having door latching and substrate clamping mechanisms | Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-11-27 |
| 7293642 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-11-13 |
| 7258520 | Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing | Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt, Loy Randall Stuart | 2007-08-21 |
| 7243003 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-07-10 |
| 7234584 | System for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-06-26 |
| 7230702 | Monitoring of smart pin transition timing | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2007-06-12 |
| 7221993 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Eric A. Englhardt, Vinay Shah, Martin R. Elliott, Jeffrey C. Hudgens | 2007-05-22 |
| 7168553 | Dynamically balanced substrate carrier handler | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2007-01-30 |
| 7156221 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens | 2007-01-02 |
| 7077264 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2006-07-18 |
| 6955197 | Substrate carrier having door latching and substrate clamping mechanisms | Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt | 2005-10-18 |
| 6799939 | Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers | Howard Grunes | 2004-10-05 |
| 6352403 | Controlled environment enclosure and mechanical interface | Boris Fishkin, Seiji Sato | 2002-03-05 |
| 6102164 | Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers | William McClintock, Howard Grunes | 2000-08-15 |