Issued Patents All Time
Showing 76–94 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6082948 | Controlled environment enclosure and mechanical interface | Boris Fishkin, Seiji Sato | 2000-07-04 |
| 6045620 | Two-piece slit valve insert for vacuum processing system | Avi Tepman | 2000-04-04 |
| 6027574 | Method of drying a substrate by lowering a fluid surface level | Boris Fishkin, John Hearne | 2000-02-22 |
| 5990585 | Two-axis magnetically coupled robot | — | 1999-11-23 |
| 5884640 | Method and apparatus for drying substrates | Boris Fishkin, John Hearne | 1999-03-23 |
| 5879127 | Robot assembly | Howard Grunes, Avi Tepman | 1999-03-09 |
| 5764012 | Two-axis magnetically coupled robot | — | 1998-06-09 |
| 5763851 | Slotted RF coil shield for plasma deposition system | John C. Forster, Aihua Chen, Howard Grunes, Ralf Hofmann, Zheng Xu +1 more | 1998-06-09 |
| 5697750 | Controlled environment enclosure and mechanical interface | Boris Fishkin, Seiji Sato | 1997-12-16 |
| 5678980 | Robot assembly | Howard Grunes, Avi Tepman | 1997-10-21 |
| 5656902 | Two-axis magnetically coupled robot | — | 1997-08-12 |
| 5583408 | Two-axis magnetically coupled robot | — | 1996-12-10 |
| 5469035 | Two-axis magnetically coupled robot | — | 1995-11-21 |
| 5447409 | Robot assembly | Howard Grunes, Avi Tepman | 1995-09-05 |
| 5355066 | Two-axis magnetically coupled robot | — | 1994-10-11 |
| 5280983 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng +5 more | 1994-01-25 |
| 5227708 | Two-axis magnetically coupled robot | — | 1993-07-13 |
| 5224809 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng +5 more | 1993-07-06 |
| 4911597 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng +5 more | 1990-03-27 |