Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7419551 | Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another | Richard Lewington, Darin Bivens, Ajay Kumar, Ibrahim M. Ibrahim, Michael N. Grimbergen +2 more | 2008-09-02 |
| 7104267 | Planarized copper cleaning for reduced defects | Ramin Emami, Shijian Li, Sen-Hou Ko, Fred C. Redeker | 2006-09-12 |
| 6921494 | Backside etching in a scrubber | Brian J. Brown, Radha Nayak, Fred C. Redeker, Michael Sugarman, John M. White | 2005-07-26 |
| 6572453 | Multi-fluid polishing process | Kapila Wijekoon, Stan Tsai, Yuchun Wang, Doyle E. Bennett, Fred C. Redeker +1 more | 2003-06-03 |
| 6558471 | Scrubber operation | Brian J. Brown, Yufei Chen, David G. Andeen | 2003-05-06 |
| 6432826 | Planarized Cu cleaning for reduced defects | Ramin Emami, Shijian Li, Sen-Hou Ko, Fred C. Redeker | 2002-08-13 |
| 6371836 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, Robert D. Tolles, James Nystrom, Doyle E. Bennett | 2002-04-16 |
| 6192601 | Method and apparatus for reducing particle contamination during wafer transport | Steve Ghanayem | 2001-02-27 |
| 6135868 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, Robert D. Tolles, James Nystrom, Doyle E. Bennett | 2000-10-24 |
| 6106634 | Methods and apparatus for reducing particle contamination during wafer transport | Steve Ghanayem | 2000-08-22 |
| 5777245 | Particle dispersing system and method for testing semiconductor manufacturing equipment | Steve Ghanayem, Nancy Cantwell, Daniel J. Rader, Anthony S. Geller | 1998-07-07 |