Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483116 | Methods of depositing metal films using metal oxyhalide precursors | Xinyu Fu, David Knapp, David Thompson, Mei Chang | 2019-11-19 |
| 10465294 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Benjamin Schmiege | 2019-11-05 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more | 2019-09-10 |
| 10364492 | Film deposition using precursors containing amidoimine ligands | David Thompson, Ravi Kanjolia, Shaun Garrett | 2019-07-30 |
| 10323054 | Precursors for deposition of metal, metal nitride and metal oxide based films of transition metals | Benjamin Schmiege, David Thompson | 2019-06-18 |
| 10315995 | Nitrogen-containing ligands and their use in atomic layer deposition methods | David Thompson | 2019-06-11 |
| 10297462 | Methods of etching films comprising transition metals | Benjamin Schmiege, David Thompson | 2019-05-21 |
| 10242885 | Selective dry etching of metal films comprising multiple metal oxides | David Thompson, Benjamin Schmiege | 2019-03-26 |
| 10233547 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Xikun Wang, Jie Liu +1 more | 2019-03-19 |
| 10221481 | Metal complexes containing amidoimine ligands | Ravi Kanjolia, Shaun Garratt, David Thompson | 2019-03-05 |
| 10199215 | Apparatus and method for selective deposition | Abhishek Dube, Schubert S. Chu, Jessica S. Kachian, David Thompson | 2019-02-05 |
| 10121671 | Methods of depositing metal films using metal oxyhalide precursors | Xinyu Fu, David Knapp, David Thompson, Mei Chang | 2018-11-06 |
| 10115593 | Chemical modification of hardmask films for enhanced etching and selective removal | David Knapp, Simon Huang, Philip Alan Kraus, David Thompson | 2018-10-30 |
| 10096514 | Seamless trench fill using deposition/etch techniques | David Thompson | 2018-10-09 |
| 10083834 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan | 2018-09-25 |
| 10036089 | Methods of depositing a metal alloy film | David Thompson | 2018-07-31 |
| 10000853 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Glen Gilchrist | 2018-06-19 |
| 9982345 | Deposition of metal films using beta-hydrogen free precursors | David Thompson, David Knapp | 2018-05-29 |
| 9922872 | Tungsten films by organometallic or silane pre-treatment of substrate | David Knapp, Xinyu Fu, Srinivas Gandikota | 2018-03-20 |
| 9896770 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Xikun Wang, Jie Liu +1 more | 2018-02-20 |
| 9870915 | Chemical modification of hardmask films for enhanced etching and selective removal | David Knapp, Simon Huang, Philip Alan Kraus, David Thompson | 2018-01-16 |
| 9799533 | Methods of etching films comprising transition metals | Benjamin Schmiege, David Thompson | 2017-10-24 |
| 9768013 | Apparatus and method for selective deposition | Abhishek Dube, Schubert S. Chu, Jessica S. Kachian, David Thompson | 2017-09-19 |
| 9721787 | Film deposition using tantalum precursors | David Thompson | 2017-08-01 |
| 9711366 | Selective etch for metal-containing materials | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Soonam Park, Xikun Wang | 2017-07-18 |