Issued Patents All Time
Showing 76–100 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8190285 | Feedback for polishing rate correction in chemical mechanical polishing | Jun Qian, Charles C. Garretson, Sivakumar Dhandapani, Harry Q. Lee | 2012-05-29 |
| 8088298 | Spectra based endpointing for chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu | 2012-01-03 |
| 8039397 | Using optical metrology for within wafer feed forward process control | Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Zhize Zhu, Wen-Chiang Tu | 2011-10-18 |
| 8014004 | Determining physical property of substrate | Abraham Ravid, Boguslaw A. Swedek, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more | 2011-09-06 |
| 7952708 | High throughput measurement system | Abraham Ravid, Boguslaw A. Swedek, Dominic J. Benvegnu, Jun Qian, Sidney P. Huey +3 more | 2011-05-31 |
| 7938714 | Polishing pad assembly with glass or crystalline window | Dominic J. Benvegnu, Bogdan Swedek | 2011-05-10 |
| 7931522 | Removable optical monitoring system for chemical mechanical polishing | Dominic J. Benvegnu, Bogdan Swedek | 2011-04-26 |
| 7840375 | Methods and apparatus for generating a library of spectra | Abraham Ravid, Boguslaw A. Swedek, Dominic J. Benvegnu, Jun Qian, Sidney P. Huey +3 more | 2010-11-23 |
| 7774086 | Substrate thickness measuring during polishing | Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek, Lakshmanan Karuppiah | 2010-08-10 |
| 7768659 | Determining copper concentration in spectra | Dominic J. Benvegnu, Boguslaw A. Swedek, Jimin Zhang, Harry Q. Lee | 2010-08-03 |
| 7764377 | Spectrum based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, Bogdan Swedek | 2010-07-27 |
| 7746485 | Determining physical property of substrate | Abraham Ravid, Boguslaw A. Swedek, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more | 2010-06-29 |
| 7651385 | Polishing system with optical head | Dominic J. Benvegnu, Bogdan Swedek | 2010-01-26 |
| 7614933 | Polishing pad assembly with glass or crystalline window | Dominic J. Benvegnu, Bogdan Swedek | 2009-11-10 |
| 7614936 | Spectrum based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, Bogdan Swedek | 2009-11-10 |
| 7444198 | Determining physical property of substrate | Abraham Ravid, Boguslaw A. Swedek, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more | 2008-10-28 |
| 7409260 | Substrate thickness measuring during polishing | Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek, Lakshmanan Karuppiah | 2008-08-05 |
| 7406394 | Spectra based endpointing for chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu | 2008-07-29 |
| 7306507 | Polishing pad assembly with glass or crystalline window | Dominic J. Benvegnu, Bogdan Swedek | 2007-12-11 |
| 7226339 | Spectrum based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, Bogdan Swedek | 2007-06-05 |
| 7226337 | Platen and head rotation rates for monitoring chemical mechanical polishing | — | 2007-06-05 |
| 7210980 | Sealed polishing pad, system and methods | Bogdan Swedek, David J. Lischka, Dominic J. Benvegnu | 2007-05-01 |
| 7163437 | System with sealed polishing pad | Bogdan Swedek, David J. Lischka, Dominic J. Benvegnu | 2007-01-16 |
| 7153185 | Substrate edge detection | Manoocher Birang, Boguslaw A. Swedek | 2006-12-26 |
| 7112119 | Sealed polishing pad methods | Bogdan Swedek, David J. Lischka, Dominic J. Benvegnu | 2006-09-26 |