Issued Patents All Time
Showing 101–107 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7097537 | Determination of position of sensor measurements during polishing | Nils Johansson, Manoocher Birang, Boguslaw A. Swedek, Ingemar Carlsson | 2006-08-29 |
| 7074109 | Chemical mechanical polishing control system and method | Doyle E. Bennett, Manoocher Birang, Jimin Zhang, Boguslaw A. Swedek | 2006-07-11 |
| 7025658 | Platen and head rotation rates for monitoring chemical mechanical polishing | — | 2006-04-11 |
| 6991516 | Chemical mechanical polishing with multi-stage monitoring of metal clearing | Dirk De Roover, Jimin Zhang, Boguslaw A. Swedek, Doyle E. Bennett, Manoocher Birang | 2006-01-31 |
| 6945845 | Chemical mechanical polishing apparatus with non-conductive elements | Doyle E. Bennett, Sandeep Rammohan Koppikar, Boguslaw A. Swedek, Nils Johansson | 2005-09-20 |
| 6435942 | Chemical mechanical polishing processes and components | Raymond R. Jin, Fred C. Redeker, Thomas H. Osterheld | 2002-08-20 |
| 6361405 | Utility wafer for chemical mechanical polishing | Benjamin A. Bonner, Thomas H. Osterheld, Sidney P. Huey | 2002-03-26 |