Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7437206 | Chemical-mechanical planarization controller | Abbas Emami-Naeini, Jon Lloyd Ebert | 2008-10-14 |
| 6991516 | Chemical mechanical polishing with multi-stage monitoring of metal clearing | Jeffrey Drue David, Jimin Zhang, Boguslaw A. Swedek, Doyle E. Bennett, Manoocher Birang | 2006-01-31 |