Issued Patents All Time
Showing 26–50 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9573242 | Computer program product and method of controlling polishing of a substrate | — | 2017-02-21 |
| 9551567 | Reducing noise in spectral data from polishing substrates | Boguslaw A. Swedek, Benjamin Cherian | 2017-01-24 |
| 9482610 | Techniques for matching spectra | Kiran Shrestha, Boguslaw A. Swedek, Harry Q. Lee | 2016-11-01 |
| 9372116 | Automatic initiation of reference spectra library generation for optical monitoring | Jun Qian | 2016-06-21 |
| 9362186 | Polishing with eddy current feed meaurement prior to deposition of conductive layer | Tomohiko Kitajima, Jun Qian, Taketo Sekine, Garlen C. Leung, Sidney P. Huey | 2016-06-07 |
| 9352440 | Serial feature tracking for endpoint detection | — | 2016-05-31 |
| 9346146 | Adjusting polishing rates by using spectrographic monitoring of a substrate during processing | Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek | 2016-05-24 |
| 9289875 | Feed forward and feed-back techniques for in-situ process control | Jun Qian, Harry Q. Lee | 2016-03-22 |
| 9283653 | Dynamically tracking spectrum features for endpoint detection | Harry Q. Lee | 2016-03-15 |
| 9233450 | Optical detection of metal layer clearance | Dominic J. Benvegnu | 2016-01-12 |
| 9227293 | Multi-platen multi-head polishing architecture | Boguslaw A. Swedek, Doyle E. Bennett, Thomas H. Osterheld, Benjamin Cherian, Dominic J. Benvegnu +3 more | 2016-01-05 |
| 9221147 | Endpointing with selective spectral monitoring | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld, Gregory E. Menk +2 more | 2015-12-29 |
| 9168630 | User-input functions for data sequences in polishing endpoint detection | Harry Q. Lee, Dominic J. Benvegnu, Boguslaw A. Swedek | 2015-10-27 |
| 9142466 | Using spectra to determine polishing endpoints | Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu | 2015-09-22 |
| 9117751 | Endpointing detection for chemical mechanical polishing based on spectrometry | Dominic J. Benvegnu, Boguslaw A. Swedek | 2015-08-25 |
| 9056383 | Path for probe of spectrographic metrology system | Benjamin Cherian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld, Jun Qian +4 more | 2015-06-16 |
| 9011202 | Fitting of optical model with diffraction effects to measured spectrum | — | 2015-04-21 |
| 8992286 | Weighted regression of thickness maps from spectral data | Benjamin Cherian, Boguslaw A. Swedek, Dominic J. Benvegnu, Jun Qian, Thomas H. Osterheld | 2015-03-31 |
| 8977379 | Endpoint method using peak location of spectra contour plots versus time | Harry Q. Lee, Dominic J. Benvegnu, Boguslaw A. Swedek | 2015-03-10 |
| 8954186 | Selecting reference libraries for monitoring of multiple zones on a substrate | Jun Qian, Boguslaw A. Swedek, Harry Q. Lee, Sivakumar Dhandapani, Thomas H. Osterheld | 2015-02-10 |
| 8944884 | Fitting of optical model to measured spectrum | Dominic J. Benvegnu | 2015-02-03 |
| 8942842 | Varying optical coefficients to generate spectra for polishing control | Dominic J. Benvegnu, Xiaoyuan Hu | 2015-01-27 |
| 8932107 | Gathering spectra from multiple optical heads | Boguslaw A. Swedek, Dominic J. Benvegnu, Sivakumar Dhandapani | 2015-01-13 |
| 8930013 | Adaptively tracking spectrum features for endpoint detection | Harry Q. Lee, Thian Choi Lim, Gary Lam | 2015-01-06 |
| 8892568 | Building a library of spectra for optical monitoring | Dominic J. Benvegnu, Xiaoyuan Hu | 2014-11-18 |