| 7998358 |
Peak-based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, David J. Lischka |
2011-08-16 |
| 7938714 |
Polishing pad assembly with glass or crystalline window |
Dominic J. Benvegnu, Jeffrey Drue David |
2011-05-10 |
| 7931522 |
Removable optical monitoring system for chemical mechanical polishing |
Dominic J. Benvegnu, Jeffrey Drue David |
2011-04-26 |
| 7764377 |
Spectrum based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, Jeffrey Drue David |
2010-07-27 |
| 7727049 |
Friction sensor for polishing system |
Dominic J. Benvegnu |
2010-06-01 |
| 7651385 |
Polishing system with optical head |
Dominic J. Benvegnu, Jeffrey Drue David |
2010-01-26 |
| 7614933 |
Polishing pad assembly with glass or crystalline window |
Dominic J. Benvegnu, Jeffrey Drue David |
2009-11-10 |
| 7614936 |
Spectrum based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, Jeffrey Drue David |
2009-11-10 |
| 7306507 |
Polishing pad assembly with glass or crystalline window |
Dominic J. Benvegnu, Jeffrey Drue David |
2007-12-11 |
| 7226339 |
Spectrum based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, Jeffrey Drue David |
2007-06-05 |
| 7210980 |
Sealed polishing pad, system and methods |
David J. Lischka, Jeffrey Drue David, Dominic J. Benvegnu |
2007-05-01 |
| 7163437 |
System with sealed polishing pad |
David J. Lischka, Jeffrey Drue David, Dominic J. Benvegnu |
2007-01-16 |
| 7112119 |
Sealed polishing pad methods |
David J. Lischka, Jeffrey Drue David, Dominic J. Benvegnu |
2006-09-26 |
