Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821085 | Methods of selective atomic layer deposition | Mark Saly, David Thompson, Tobin Kaufman-Osborn, Kurt Fredrickson, Thomas Knisley +1 more | 2023-11-21 |
| 11823893 | Methods of depositing SiCON with C, O, and N compositional control | Mark Saly, David Thompson, Thomas Knisley | 2023-11-21 |
| 11760768 | Molybdenum(0) precursors for deposition of molybdenum films | Chandan Kr Barik, John Sudijono, Chandan Das, Doreen Wei Ying Yong, Mark Saly +1 more | 2023-09-19 |
| 11756785 | Molecular layer deposition contact landing protection for 3D NAND | Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick | 2023-09-12 |
| 11732356 | Multilayer encapsulation stacks by atomic layer deposition | Cong Trinh, Mihaela Balseanu, Maribel Maldonado-Garcia, Ning Li, Mark Saly +2 more | 2023-08-22 |
| 11702733 | Methods for depositing blocking layers on conductive surfaces | Lakmal C. Kalutarage, Aaron Dangerfield, Feng Q. Liu, Mark Saly, Michael Haverty +1 more | 2023-07-18 |
| 11658025 | Chalcogen precursors for deposition of silicon nitride | Chandan Kr Barik, Michael Haverty, Muthukumar Kaliappan, Cong Trinh, John Sudijono +3 more | 2023-05-23 |
| 11621161 | Selective deposition of a passivation film on a metal surface | Yong Wang, Andrea Leoncini, Doreen Wei Ying Yong, John Sudijono | 2023-04-04 |
| 11621172 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Madhur Sachan, Regina Freed | 2023-04-04 |
| 11562904 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2023-01-24 |
| 11549181 | Methods for atomic layer deposition of SiCO(N) using halogenated silylamides | Mark Saly | 2023-01-10 |
| 11545354 | Molecular layer deposition method and system | Zeqing Shen, Bo Qi, Abhijit Basu Mallick, Xinke Wang, Mark Saly | 2023-01-03 |
| 11536708 | Methods to fabricate dual pore devices | Mark Saly, Keenan N. Woods, Joseph R. Johnson, William J. Durand, Michael P. Chudzik +2 more | 2022-12-27 |
| 11527407 | Vapor deposition of carbon-based films | Andrea Leoncini | 2022-12-13 |
| 11515156 | Methods for depositing blocking layers on conductive surfaces | Mark Saly, Wenyi Liu | 2022-11-29 |
| 11447865 | Deposition of low-κ films | Shuaidi Zhang, Ning Li, Mihaela Balseanu, Mark Saly, Thomas Knisley | 2022-09-20 |
| 11450525 | Selective aluminum oxide film deposition | Liqi Wu, Hung T. Nguyen, Mark Saly, Feng Q. Liu, David Thompson | 2022-09-20 |
| 11417515 | Methods for depositing blocking layers on metal surfaces | Mark Saly, Lakmal C. Kalutarage, Thomas Knisley | 2022-08-16 |
| 11390638 | Molybdenum(VI) precursors for deposition of molybdenum films | Andrea Leoncini, Paul Mehlmann, Nemanja Dordevic, Han Vinh Huynh, Doreen Wei Ying Yong +2 more | 2022-07-19 |
| 11371136 | Methods for selective deposition of dielectric on silicon oxide | Mark Saly, David Thompson, Lakmal C. Kalutarage, Rana Howlader | 2022-06-28 |
| 11342481 | Preclean and encapsulation of microLED features | Thomas Knisley, Mark Saly, Mingwei Zhu | 2022-05-24 |
| 11186909 | Methods of depositing low-K films | Mark Saly | 2021-11-30 |
| 11164745 | Method of enhancing selective deposition by cross-linking of blocking molecules | Mark Saly | 2021-11-02 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Keiichi Tanaka, Eswaranand Venkatasubramanian, Mandyam Sriram, Pramit Manna +2 more | 2021-06-08 |
| 10985014 | Methods for selective deposition on silicon-based dielectrics | Mark Saly | 2021-04-20 |