Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957532 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Li-Qun Xia, Mark Saly | 2021-03-23 |
| 10943780 | Methods for ALD of metal oxides on metal surfaces | Mark Saly, David Thompson, Li-Qun Xia | 2021-03-09 |
| 10892157 | Methods for depositing blocking layers on conductive surfaces | Mark Saly, Wenyi Liu | 2021-01-12 |
| 10804094 | Methods of depositing SiCON with C, O and N compositional control | Mark Saly, David Thompson, Thomas Knisley | 2020-10-13 |
| 10699897 | Acetylide-based silicon precursors and their use as ALD/CVD precursors | Mark Saly, Jeffrey W. Anthis, Feng Q. Liu, David Thompson | 2020-06-30 |
| 10453678 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Li-Qun Xia, Mark Saly | 2019-10-22 |
| 10219373 | Selective deposition of thin film dielectrics using surface blocking chemistry | David Thompson, Mark Saly | 2019-02-26 |
| 9911591 | Selective deposition of thin film dielectrics using surface blocking chemistry | David Thompson, Mark Saly | 2018-03-06 |
| 9234274 | Method of atomic layer deposition of elemental metal | Anshita Gairola | 2016-01-12 |