Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9610672 | Configurable pressure design for multizone chemical mechanical planarization polishing head | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2017-04-04 |
| 9452505 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Steven M. Zuniga, Thomas Brezoczky | 2016-09-27 |
| 9368371 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2016-06-14 |
| 9214375 | End effector having multiple-position contact points | Matthew J. Rodnick, Brandon Senn, Richard M. Blank | 2015-12-15 |
| 8808062 | Multi-chamber carrier head with a textured membrane | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Steven M. Zuniga, Thomas Brezoczky | 2014-08-19 |
| 8545660 | Bonding apparatus and method | Steven M. Zuniga, Robert D. Tolles, Derek Aqui, Anthony Senn, Keenan Leon Guerrero | 2013-10-01 |
| 8535121 | Retaining ring and articles for carrier head | Doyle E. Bennett, Hung Chih Chen | 2013-09-17 |
| 8469776 | Flexible membrane for carrier head | Steven M. Zuniga, Jeonghoon Oh | 2013-06-25 |
| 8454413 | Multi-chamber carrier head with a textured membrane | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Steven M. Zuniga, Thomas Brezoczky | 2013-06-04 |
| 8376813 | Retaining ring and articles for carrier head | Doyle E. Bennett, Hung Chih Chen | 2013-02-19 |
| 8360409 | Apparatus and method for simultaneous treatment of multiple workpieces | Steven M. Zuniga, Derek Aqui, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal | 2013-01-29 |
| 8334191 | Two-chamber system and method for serial bonding and exfoliation of multiple workpieces | Steven M. Zuniga, Derek Aqui, Kirk Liebscher, John Alexander, Keenan Leon Guerrero | 2012-12-18 |
| 8207047 | Apparatus and method for simultaneous treatment of multiple workpieces | Steven M. Zuniga, Derek Aqui, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal | 2012-06-26 |
| 8151852 | Bonding apparatus and method | Steven M. Zuniga, Robert D. Tolles, Derek Aqui, Anthony Senn, Keenan Leon Guerrero | 2012-04-10 |
| 8021215 | Carrier head with retaining ring and carrier ring | Steven M. Zuniga, Jeonghoon Oh | 2011-09-20 |
| 7950985 | Flexible membrane for carrier head | Steven M. Zuniga, Jeonghoon Oh | 2011-05-31 |
| 7901273 | Carrier ring for carrier head | Steven M. Zuniga, Jeonghoon Oh | 2011-03-08 |
| 7727055 | Flexible membrane for carrier head | Steven M. Zuniga, Jeonghoon Oh | 2010-06-01 |
| 7699688 | Carrier ring for carrier head | Steven M. Zuniga, Jeonghoon Oh | 2010-04-20 |
| 7654888 | Carrier head with retaining ring and carrier ring | Steven M. Zuniga, Jeonghoon Oh | 2010-02-02 |
| 7575504 | Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly | Steven M. Zuniga, Jeonghoon Oh | 2009-08-18 |
| 7527271 | Fast substrate loading on polishing head without membrane inflation step | Jeonghoon Oh, Steven M. Zuniga, Hung Chih Chen | 2009-05-05 |
| 7255637 | Carrier head vibration damping | Doyle E. Bennett, Hung Chih Chen | 2007-08-14 |
| 6739958 | Carrier head with a vibration reduction feature for a chemical mechanical polishing system | Sandy Chao | 2004-05-25 |
| 6592439 | Platen for retaining polishing material | Shijian Li, Manoocher Birang, Ramin Emami, Douglas Orcutt Brown, Shi-Ping Wang +2 more | 2003-07-15 |