| 10707113 |
End effector assembly for clean/dirty substrate handling |
Ross Embertson, Brandon Senn, Austin Ngo |
2020-07-07 |
| 9779977 |
End effector assembly for clean/dirty substrate handling |
Ross Embertson, Brandon Senn, Austin Ngo |
2017-10-03 |
| 9698035 |
Microstructures for improved wafer handling |
— |
2017-07-04 |
| 9673071 |
Buffer station for thermal control of semiconductor substrates transferred therethrough and method of transferring semiconductor substrates |
Keith Freeman Wood |
2017-06-06 |
| 9434071 |
Wafer handling traction control system |
— |
2016-09-06 |
| 9214375 |
End effector having multiple-position contact points |
Brandon Senn, Andrew J. Nagengast, Richard M. Blank |
2015-12-15 |
| 9184084 |
Wafer handling traction control system |
— |
2015-11-10 |
| 8731718 |
Dual sensing end effector with single sensor |
— |
2014-05-20 |
