Issued Patents All Time
Showing 201–225 of 256 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319565 | Stable hydride source compositions for manufacture of semiconductor devices and structures | Michael A. Todd, Gautam Bhandari | 2001-11-20 |
| 6316797 | Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston +1 more | 2001-11-13 |
| 6312816 | A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, Ba, Mg) (Zr, Ti, Nb, Ta)O3 films having utility in ferroelectric random access memories and high performance thin film microactuators | Jeffrey F. Roeder, Ing-Shin Chen, Steven M. Bilodeau | 2001-11-06 |
| 6303391 | Low temperature chemical vapor deposition process for forming bismuth-containing ceramic films useful in ferroelectric memory devices | Frank Hintermaier, Christine Dehm, Wolfgang Hoenlein, Peter C. Van Buskirk, Jeffrey F. Roeder +2 more | 2001-10-16 |
| 6284654 | Chemical vapor deposition process for fabrication of hybrid electrodes | Jeffrey F. Roeder, Peter C. Van Buskirk | 2001-09-04 |
| 6277436 | Liquid delivery MOCVD process for deposition of high frequency dielectric materials | Gregory T. Stauf, Jeffrey F. Roeder | 2001-08-21 |
| 6254792 | Isotropic dry cleaning process for noble metal integrated circuit structures | Peter C. Van Buskirk, Frank Dimeo, Jr., Peter C. Kirlin | 2001-07-03 |
| 6218518 | Tetrahydrofuran-adducted group II .beta.-diketonate complexes as source reagents for chemical vapor deposition | Witold Paw | 2001-04-17 |
| 6214105 | Alkane and polyamine solvent compositions for liquid delivery chemical vapor deposition | Frank Hintermaier | 2001-04-10 |
| 6210781 | Method for photoselective seeding and metallization of three-dimensional materials | Luis J. Matienzo, Cindy Reidsema Simpson, Joseph E. Varsik | 2001-04-03 |
| 6204402 | Indium source reagent compositions, and use thereof for deposition of indium-containing films on substrates and ion implantation of indium-doped shallow junction microelectronics structures | Chongying Xu | 2001-03-20 |
| 6204158 | Reduced diffusion of a mobile specie from a metal oxide ceramic into the substrate | Bryan C. Hendrix, Frank Hintermaier, Jeffrey F. Roeder, Debra A. Desrochers | 2001-03-20 |
| 6180420 | Low temperature CVD processes for preparing ferroelectric films using Bi carboxylates | Frank Hintermaier, Peter C. Van Buskirk, Jeffrey F. Roeder, Bryan C. Hendrix, Debra A. Desrochers | 2001-01-30 |
| 6177135 | Low temperature CVD processes for preparing ferroelectric films using Bi amides | Frank Hintermaier, Peter C. Van Buskirk, Jeffrey F. Roeder, Bryan C. Hendrix, Debra A. Desrochers | 2001-01-23 |
| 6162712 | Platinum source compositions for chemical vapor deposition of platinum | Peter S. Kirlin, Sofia Pombrik | 2000-12-19 |
| 6159641 | Method for the repair of defects in lithographic masks | Paul B. Comita, Franklin Mark Schellenberg | 2000-12-12 |
| 6146608 | Stable hydride source compositions for manufacture of semiconductor devices and structures | Michael A. Todd, Gautam Bhandari | 2000-11-14 |
| 6143191 | Method for etch fabrication of iridium-based electrode structures | Frank Dimeo, Jr. | 2000-11-07 |
| 6133051 | Amorphously deposited metal oxide ceramic films | Frank Hintermaier, Bryan C. Hendrix, Jeffrey F. Roeder, Debra A. Desrochers | 2000-10-17 |
| 6123993 | Method and apparatus for forming low dielectric constant polymeric films | Chongying Xu, Ralph Carl, Edward A. Sturm | 2000-09-26 |
| 6120846 | Method for the selective deposition of bismuth based ferroelectric thin films by chemical vapor deposition | Frank Hintermaier, Bryan C. Hendrix, Jeff Roeder, Peter Buskirk | 2000-09-19 |
| 6117571 | Compositions and method for forming doped A-site deficient thin-film manganate layers on a substrate | Galena Doubinina, Daniel Studebaker | 2000-09-12 |
| 6110529 | Method of forming metal films on a substrate by chemical vapor deposition | Robin A. Gardiner, Peter S. Kirlin, Douglas Gordon, Timothy E. Glassman, Sofia Pombrik +1 more | 2000-08-29 |
| 6111124 | Lewis base adducts of anhydrous mononuclear tris(.beta.-diketonate) bismuth compositions for deposition of bismuth-containing films, and method of making the same | Raymond H. Dubois | 2000-08-29 |
| 6111122 | Group II MOCVD source reagents, and method of forming Group II metal-containing films utilizing same | Witold Paw | 2000-08-29 |