SS

Shau-Lin Shue

TSMC: 42 patents #26 of 4,162Top 1%
Overall (2024): #570 of 561,600Top 1%
42
Patents 2024

Issued Patents 2024

Showing 26–42 of 42 patents

Patent #TitleCo-InventorsDate
11990400 Capping layer overlying dielectric structure to increase reliability Ting-Ya Lo, Chi-Lin Teng, Hai-Ching Chen, Hsin-Yen Huang, Shao-Kuan Lee +1 more 2024-05-21
11972975 Semiconductor device structure having air gap and method for forming the same Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai, Hsin-Chieh Yao, Chih Wei Lu +1 more 2024-04-30
11967552 Methods of forming interconnect structures in semiconductor fabrication Ming-Han Lee 2024-04-23
11948834 Selective deposition of barrier layer Hsin-Yen Huang, Hai-Ching Chen 2024-04-02
11935783 Selective deposition for integrated circuit interconnect structures Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hai-Ching Chen 2024-03-19
11929326 Method of forming graphene barrier layer in interconnect structure Shin-Yi Yang, Ming-Han Lee 2024-03-12
11929258 Via connection to a partially filled trench Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee +1 more 2024-03-12
11923306 Semiconductor structure having air gaps and method for manufacturing the same Chia-Wei Su, Chia-Tien Wu, Hsin-Ping Chen 2024-03-05
11923243 Semiconductor structure having air gaps and method for manufacturing the same Hsin-Yen Huang, Ting-Ya Lo, Shao-Kuan Lee, Chi-Lin Teng, Cheng-Chin Lee +1 more 2024-03-05
11908792 Semiconductor device comprising cap layer over dielectric layer and method of manufacture Shao-Kuan Lee, Hai-Ching Chen, Hsin-Yen Huang, Cheng-Chin Lee 2024-02-20
11908794 Protection liner on interconnect wire to enlarge processing window for overlying interconnect via Shin-Yi Yang, Hsin-Yen Huang, Ming-Han Lee, Yu-Chen Chan, Meng-Pei Lu 2024-02-20
11908789 Selective formation of conductor nanowires Chao-Hsien Peng, Hsiang-Huan Lee 2024-02-20
11901349 Semiconductor packages and methods for forming the same Han-Tang Hung, Shin-Yi Yang, Ming-Han Lee 2024-02-13
11901221 Interconnect strucutre with protective etch-stop Shao-Kuan Lee, Hai-Ching Chen, Hsin-Yen Huang, Cheng-Chin Lee 2024-02-13
11894238 Method of fabricating semiconductor device with reduced trench distortions Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2024-02-06
11894266 Metal capping layer and methods thereof Shao-Kuan Lee, Cheng-Chin Lee, Hsin-Yen Huang, Hai-Ching Chen 2024-02-06
11860550 Multi-metal fill with self-aligned patterning and dielectric with voids Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Li-Lin Su, Yung-Hsu Wu 2024-01-02