Issued Patents 2023
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann +1 more | 2023-11-14 |
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Tejas Ulavi, Arkaprava Dan, Mike Murtagh | 2023-10-17 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2023-10-17 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11746417 | Clean isolation valve for reduced dead volume | Ashutosh Agarwal | 2023-09-05 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Joseph AuBuchon, Mario D. Silvetti, Hari Ponnekanti | 2023-08-01 |
| 11682576 | Pedestal heater for spatial multi-wafer processing tool | Tejas Ulavi, Dhritiman Subha Kashyap | 2023-06-20 |
| 11623253 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Arkaprava Dan, Wei V. Tang | 2023-04-11 |
| 11602064 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Kalesh Panchaxari Karadi, Tejas Ulavi | 2023-03-07 |
| 11599069 | Method for auto-tuning and process performance assessment of chamber control | Mauro Cimino, Arkaprava Dan | 2023-03-07 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more | 2023-02-21 |
| 11584993 | Thermally uniform deposition station | Jared Ahmad Lee, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah | 2023-02-21 |
| 11583816 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael R. Rice | 2023-02-21 |
| 11549183 | Showerhead with inlet mixer | Ashutosh Agarwal, Dhritiman Subha Kashyap, Kartik Shah, Yanjun Xia | 2023-01-10 |