Issued Patents 2020
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879068 | Extreme ultraviolet lithography for high volume manufacture of a semiconductor device | Yann Mignot, John C. Arnold, Oleg Gluschenkov | 2020-12-29 |
| 10825720 | Single trench damascene interconnect using TiN HMO | Yann Mignot, Muthumanickam Sankarapandian | 2020-11-03 |
| 10818548 | Method and structure for cost effective enhanced self-aligned contacts | Kafai Lai, Chih-Chao Yang, Su Chen Fan | 2020-10-27 |
| 10784333 | Electronic devices having spiral conductive structures | Peng Xu, Kangguo Cheng, Xuefeng Liu, Chi-Chun Liu | 2020-09-22 |
| 10782606 | Photolithography methods and structures that reduce stochastic defects | Yong Liang, Lei Sun, Craig D. Higgins | 2020-09-22 |
| 10749011 | Area selective cyclic deposition for VFET top spacer | Zhenxing Bi, Kangguo Cheng, Yi Song | 2020-08-18 |
| 10672705 | Method of forming a straight via profile with precise critical dimension control | Junli Wang, Yann Mignot, Joe Lee | 2020-06-02 |
| 10658190 | Extreme ultraviolet lithography patterning with directional deposition | Ekmini Anuja De Silva, Su Chen Fan, Yann Mignot | 2020-05-19 |
| 10658180 | EUV pattern transfer with ion implantation and reduced impact of resist residue | Yann Mignot, Oleg Gluschenkov | 2020-05-19 |
| 10629436 | Spacer image transfer with double mandrel | Yann Mignot | 2020-04-21 |
| 10622301 | Method of forming a straight via profile with precise critical dimension control | Junli Wang, Yann Mignot, Joe Lee | 2020-04-14 |
| 10607922 | Controlling via critical dimension during fabrication of a semiconductor wafer | Yann Mignot, Muthumanickam Sankarapandian | 2020-03-31 |
| 10573528 | Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic | Fee Li Lie, Dongbing Shao, Robert C. Wong | 2020-02-25 |
| 10573520 | Multiple patterning scheme integration with planarized cut patterning | Hsueh-Chung Chen, Lawrence A. Clevenger, Yann Mignot, Cornelius Brown Peethala | 2020-02-25 |
| 10559467 | Selective gas etching for self-aligned pattern transfer | John C. Arnold, Sean D. Burns, Yann Mignot | 2020-02-11 |
| 10551742 | Tunable adhesion of EUV photoresist on oxide surface | Jing Guo, Ekmini Anuja De Silva, Oleg Gluschenkov | 2020-02-04 |