Issued Patents 2020
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816906 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Sander Bas Roobol, Niels Geypen | 2020-10-27 |
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Duygu Akbulut, Alessandro Polo | 2020-09-29 |
| 10761432 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Stefan Hunsche, Markus Gerardus Martinus Maria Van Kraaij | 2020-09-01 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Murat Bozkurt, Alberto Da Costa Assafrao, Marc Johannes Noot +1 more | 2020-07-07 |
| 10656533 | Metrology in lithographic processes | Martin Jacobus Johan Jak, Kaustuve Bhattacharyya | 2020-05-19 |
| 10648919 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Stefan Michiel Witte, Gijsbert Simon Matthijs Jansen, Lars Christian Freisem, Kjeld Sijbrand Eduard Eikema | 2020-05-12 |
| 10649344 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Sander Bas Roobol | 2020-05-12 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-04-21 |
| 10607873 | Substrate edge detection | Eric Anthony Janda, Cayetano Sanchez-Fabres Cobaleda, Bernd Geh | 2020-03-31 |
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Zili Zhou, Armand Eugene Albert Koolen, Sebastianus Adrianus GOORDEN +1 more | 2020-03-24 |
| 10585363 | Alignment system | Arie Jeffrey Den Boef, Alessandro Polo, Patricius Aloysius Jacobus Tinnemans, Adrianus Johannes Hendrikus Schellekens, Elahe Yeganegi Dastgerdi +3 more | 2020-03-10 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-01-07 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo | 2020-01-07 |