Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859923 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-12-08 |
| 10794693 | Metrology method, apparatus and computer program | Farzad Farhadzadeh, Mohammadreza Hajiahmadi, Maurits Van Der Schaar | 2020-10-06 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Alberto Da Costa Assafrao, Marc Johannes Noot, Simon Gijsbert Josephus Mathijssen +1 more | 2020-07-07 |
| 10564552 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-02-18 |