Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Murat Bozkurt, Marc Johannes Noot, Simon Gijsbert Josephus Mathijssen +1 more | 2020-07-07 |
| 10551750 | Metrology method and apparatus and associated computer product | Adam Jan URBANCZYK, Hans Van Der Laan, Grzegorz Grzela, Chien-Hung Tseng, Jay Jianhui Chen | 2020-02-04 |