Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Mohammadreza Hajiahmadi, Murat Bozkurt, Alberto Da Costa Assafrao, Marc Johannes Noot, Simon Gijsbert Josephus Mathijssen +1 more | 2020-07-07 |