Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859923 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Murat Bozkurt, Arie Jeffrey Den Boef | 2020-12-08 |
| 10802409 | Metrology method and apparatus, substrate, lithographic method and associated computer product | Chi-Hsiang Fan, Youping Zhang | 2020-10-13 |
| 10802408 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Erik Johannes Maria Wallerbos, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2020-10-13 |
| 10794693 | Metrology method, apparatus and computer program | Farzad Farhadzadeh, Mohammadreza Hajiahmadi, Murat Bozkurt | 2020-10-06 |
| 10725386 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Markus Gerardus Martinus Maria Van Kraaij | 2020-07-28 |
| 10718604 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Arie Jeffrey Den Boef +7 more | 2020-07-21 |
| 10585357 | Alternative target design for metrology using modulation techniques | Youping Zhang, Hua XU | 2020-03-10 |
| 10578980 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Chi-Hsiang Fan +3 more | 2020-03-03 |
| 10564552 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Murat Bozkurt, Arie Jeffrey Den Boef | 2020-02-18 |