Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802409 | Metrology method and apparatus, substrate, lithographic method and associated computer product | Chi-Hsiang Fan, Maurits Van Der Schaar | 2020-10-13 |
| 10585357 | Alternative target design for metrology using modulation techniques | Maurits Van Der Schaar, Hua XU | 2020-03-10 |
| 10578980 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Chi-Hsiang Fan +3 more | 2020-03-03 |