Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585357 | Alternative target design for metrology using modulation techniques | Maurits Van Der Schaar, Youping Zhang | 2020-03-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585357 | Alternative target design for metrology using modulation techniques | Maurits Van Der Schaar, Youping Zhang | 2020-03-10 |