Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802409 | Metrology method and apparatus, substrate, lithographic method and associated computer product | Maurits Van Der Schaar, Youping Zhang | 2020-10-13 |
| 10782616 | Automatic selection of metrology target measurement recipes | Daimian Wang, Shengrui Zhang | 2020-09-22 |
| 10578980 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Hakki Ergün Cekli +3 more | 2020-03-03 |