Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10782616 | Automatic selection of metrology target measurement recipes | Shengrui Zhang, Chi-Hsiang Fan | 2020-09-22 |
| 10691029 | Substrate measurement recipe configuration to improve device matching | Ning GU, Jen-Shiang Wang | 2020-06-23 |