Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816904 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2020-10-27 |
| 10809631 | Method of monitoring and device manufacturing method | Everhardus Cornelis Mos, Marcel Hendrikus Maria Beems, Erik Johannes Maria Wallerbos | 2020-10-20 |
| 10802408 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Erik Johannes Maria Wallerbos, Maurits Van Der Schaar, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2020-10-13 |
| 10725372 | Method and apparatus for reticle optimization | Wim Tjibbo Tel, Marinus Jochemsen, Frank Staals, Christopher PRENTICE, Laurent Michel Marcel Depre +3 more | 2020-07-28 |
| 10642162 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2020-05-05 |