Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866527 | Methods and apparatus for monitoring a lithographic manufacturing process | Emil Peter Schmitt-Weaver, Kaustuve Bhattacharyya, Frank Staals, Leon Martin Levasier | 2020-12-15 |
| 10866523 | Process window tracker | Frank Staals, Mark John Maslow | 2020-12-15 |
| 10775705 | Patterning stack optimization | Jozef Maria Finders, Orion Jonathan Pierre Mouraille, Anton Bernhard Van Oosten | 2020-09-15 |
| 10725372 | Method and apparatus for reticle optimization | Marinus Jochemsen, Frank Staals, Christopher PRENTICE, Laurent Michel Marcel Depre, Johannes Marcus Maria Beltman +3 more | 2020-07-28 |
| 10712672 | Method of predicting patterning defects caused by overlay error | Marinus Jochemsen, Stefan Hunsche | 2020-07-14 |
| 10627722 | Etch-assist features | Thomas I. Wallow | 2020-04-21 |
| 10571806 | Method and system to monitor a process apparatus | Mark John Maslow, Frank Staals, Paul Christiaan Hinnen | 2020-02-25 |