Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866527 | Methods and apparatus for monitoring a lithographic manufacturing process | Kaustuve Bhattacharyya, Wim Tjibbo Tel, Frank Staals, Leon Martin Levasier | 2020-12-15 |
| 10684557 | Method for adjusting actuation of a lithographic apparatus | Rene Marinus Gerardus Johan Queens | 2020-06-16 |
| 10627729 | Calibration method for a lithographic apparatus | Jens Stäcker, Koenraad Remi André Maria Schreel, Roy Werkman | 2020-04-21 |