Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845719 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Wolfgang Henke, Arend Johannes Donkerbroek, Jeroen COTTAAR | 2020-11-24 |
| 10684557 | Method for adjusting actuation of a lithographic apparatus | Emil Peter Schmitt-Weaver | 2020-06-16 |
| 10558130 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Erik Johan Koop, Reiner Maria Jungblut | 2020-02-11 |