Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845719 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Wolfgang Henke, Arend Johannes Donkerbroek | 2020-11-24 |