Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10627729 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Roy Werkman | 2020-04-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10627729 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Roy Werkman | 2020-04-21 |