Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859926 | Methods for defect validation | Stefan Hunsche, Rafael Aldana Laso, Vivek Jain, Xinjian Zhou | 2020-12-08 |
| 10852646 | Displacement based overlay or alignment | Scott Anderson Middlebrooks, Stefan Hunsche, Te-Sheng WANG | 2020-12-01 |
| 10725372 | Method and apparatus for reticle optimization | Wim Tjibbo Tel, Frank Staals, Christopher PRENTICE, Laurent Michel Marcel Depre, Johannes Marcus Maria Beltman +3 more | 2020-07-28 |
| 10712672 | Method of predicting patterning defects caused by overlay error | Stefan Hunsche, Wim Tjibbo Tel | 2020-07-14 |