Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852646 | Displacement based overlay or alignment | Marinus Jochemsen, Scott Anderson Middlebrooks, Stefan Hunsche | 2020-12-01 |
| 10656531 | Apparatus and method for process-window characterization | Xiang Wan | 2020-05-19 |