Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775705 | Patterning stack optimization | Wim Tjibbo Tel, Jozef Maria Finders, Orion Jonathan Pierre Mouraille | 2020-09-15 |
| 10732511 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2020-08-04 |
| 10571812 | Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method | Fahong Li, Miguel GARCIA GRANDA, Carlo Cornelis Maria Luijten, Bart Peter Bert Segers, Cornelis Andreas Franciscus Johannes Van Der Poel +2 more | 2020-02-25 |