Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732498 | Patterning device | Pieter Cristiaan DE GROOT, Gerard Frans Jozef Schasfoort, Maksym SLADKOV, Manfred Petrus Johannes Maria DIKKERS, Jozef Maria Finders +6 more | 2020-08-04 |
| 10732511 | Projection system and mirror and radiation source for a lithographic apparatus | Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2020-08-04 |
| 10678139 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2020-06-09 |