| 10875096 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2020-12-29 |
| 10866501 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov |
2020-12-15 |
| 10788755 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2020-09-29 |
| 10761438 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2020-09-01 |
| 10747125 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2020-08-18 |
| 10739684 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2020-08-11 |
| 10705439 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2020-07-07 |
| 10705432 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2020-07-07 |
| 10684554 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2020-06-16 |
| 10678139 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +16 more |
2020-06-09 |
| 10649349 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Martinus Hendrikus Antonius Leenders, Harry Sewell, Louis John Markoya, Marcus Martinus Petrus Adrianus Vermeulen, Diane Elaine Markoya |
2020-05-12 |
| 10630037 |
Apparatus for delivering gas and illumination source for generating high harmonic radiation |
Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Krijn Frederik Bustraan +2 more |
2020-04-21 |
| 10599054 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2020-03-24 |
| 10530111 |
Apparatus for delivering gas and illumination source for generating high harmonic radiation |
Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Krijn Frederik Bustraan +2 more |
2020-01-07 |