Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10712675 | Immersion liquid, exposure apparatus, and exposure process | Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen, Anthonie Kuijper | 2020-07-14 |
| 10705432 | Lithographic apparatus and device manufacturing method | Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +5 more | 2020-07-07 |
| 10620546 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Jacobus Johannus Leonardus Hendricus Verspay, Marco Koert Stavenga | 2020-04-14 |