Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877384 | Radiation shielding device and apparatus comprising such shielding device | Philippe Habets, Günes NAKIBOGLU, Roger W. Schmitz, Remco VAN DE MEERENDONK, Joris Dominicus Bastiaan Johannes Van den Boom +1 more | 2020-12-29 |
| 10838310 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2020-11-17 |
| 10712675 | Immersion liquid, exposure apparatus, and exposure process | Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Anthonie Kuijper | 2020-07-14 |
| 10580545 | Beam delivery apparatus and method | Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more | 2020-03-03 |